Remote plasma cleaning of chambers for electronics manufacturing systems

Assignee

• Applied Materials

Inventors

• Yuanhong Guo (8 patents)
• Sheng Guo (8 patents)
• Marek Radko (5 patents)
• Steve Sansoni (11 patents)
• Xiaoxiong Yuan (43 patents)
• See-Eng Phan (18 patents)
• Yuji Murayama (24 patents)
• Pingping Gou (4 patents)
• Song-Moon Suh (21 patents)

View full patent text on Google Patents →