Gas distribution ceramic heater for deposition chamber

Assignee

• Applied Materials

Inventors

• Pingyan Lei (10 patents)
• Dien-Yeh Wu (62 patents)
• Jallepally Ravi (32 patents)
• Manjunatha Koppa (22 patents)
• Ambarish Toorihal (1 patents)
• Sandesh Yadamane (7 patents)
• Vinod Konda Purathe (4 patents)
• Xiaoxiong Yuan (43 patents)

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