Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9881787 | Deposition methods for uniform and conformal hybrid titanium oxide films | Chien-Teh Kao, Benjamin Schmiege, Xuesong Lu, Juno Yu-Ting Huang, Yu Lei +7 more | 2018-01-30 |
| 9275865 | Plasma treatment of film for impurity removal | Joshua Collins, Michael S. Jackson, Avgerinos V. Gelatos, Amit Khandelwal | 2016-03-01 |
| 9169556 | Tungsten growth modulation by controlling surface composition | Kai Wu, KieJin Park, Sang Ho Yu, Sang-Hyeob Lee, Kazuya Daito +1 more | 2015-10-27 |
| 8920564 | Methods and apparatus for thermal based substrate processing with variable temperature capability | Gwo-Chuan Tzu, Xiaoxiong Yuan, Amit Khandelwal, Avgerinos V. Gelatos, Kai Wu +3 more | 2014-12-30 |