Low resistivity tungsten film and method of manufacture

Assignee

• Applied Materials

Inventors

• Feihu Wang (10 patents)
• Joung Joo Lee (35 patents)
• Xi Cen (13 patents)
• Zhibo Yuan (2 patents)
• Wei-Sheng Lei (107 patents)
• Kai Wu (34 patents)
• Chunming Zhou (8 patents)
• Zhebo Chen (46 patents)

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