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Methods, systems, and apparatus for inkjet printing self-assembled monoloayer (SAM) structures on substrates |
Yingdong Luo, Rami Hourani, Xiaopei Deng, Kang Luo, Ludovic Godet |
2025-08-12 |
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| 12288672 |
Methods and apparatus for carbon compound film deposition |
Qiwei Liang, Srinivas D. Nemani, Chentsau Chris Ying, Ellie Yieh, Nithin Thomas ALEX |
2025-04-29 |
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| 12111572 |
Methods of greytone imprint lithography to fabricate optical devices |
Hao Tang, Kang Luo, Yongan Xu |
2024-10-08 |
$69,128,000 |
| 11955333 |
Methods and apparatus for processing a substrate |
Jethro Tannos, Bhargav S. Citla, Srinivas D. Nemani, Ellie Yieh, Joshua Rubnitz +3 more |
2024-04-09 |
$47,694,000 |
| 11735420 |
Wafer treatment for achieving defect-free self-assembled monolayers |
Chang Ke, Lei Zhou, Biao Liu, Cheng Pan, Yuanhong Guo +5 more |
2023-08-22 |
$40,609,000 |
| 11709423 |
Methods of greytone imprint lithography to fabricate optical devices |
Hao Tang, Kang Luo, Yongan Xu |
2023-07-25 |
$93,796,000 |
| 11682556 |
Methods of improving graphene deposition for processes using microwave surface-wave plasma on dielectric materials |
Jie Zhou, Qiwei Liang, Chentsau Chris Ying, Srinivas D. Nemani, Ellie Yieh |
2023-06-20 |
$48,645,000 |
| 11488856 |
Methods for gapfill in high aspect ratio structures |
Pramit Manna, Ludovic Godet, Rui Cheng, Ziqing Duan, Abhijit Basu Mallick +1 more |
2022-11-01 |
$32,150,000 |
| 11289331 |
Methods for graphene formation using microwave surface-wave plasma on dielectric materials |
Jie Zhou, Qiwei Liang, Chentsau Chris Ying, Srinivas D. Nemani, Ellie Yieh |
2022-03-29 |
$46,373,000 |
| 11101174 |
Gap fill deposition process |
Hao Jiang, Nikolaos Bekiaris, Mehul Naik |
2021-08-24 |
$92,770,000 |
| 11049731 |
Methods for film modification |
Chentsau Chris Ying, Bhargav S. Citla, Jethro Tannos, Matthew August Mattson |
2021-06-29 |
$47,858,000 |
| 10964527 |
Residual removal |
Jong Mun Kim, Biao Liu, Cheng Pan, Chentsau Ying, Srinivas D. Nemani +1 more |
2021-03-30 |
$120,425,000 |
| 10892161 |
Enhanced selective deposition process |
Biao Liu, Cheng Pan, Srinivas D. Nemani, Chang Ke, Lei Zhou |
2021-01-12 |
$84,921,000 |
| 10811303 |
Methods for gapfill in high aspect ratio structures |
Pramit Manna, Ludovic Godet, Rui Cheng, Ziqing Duan, Abhijit Basu Mallick +1 more |
2020-10-20 |
$40,793,000 |
| 10770292 |
Wafer treatment for achieving defect-free self-assembled monolayers |
Chang Ke, Lei Zhou, Biao Liu, Cheng Pan, Yuanhong Guo +5 more |
2020-09-08 |
$22,964,000 |
| 10192775 |
Methods for gapfill in high aspect ratio structures |
Pramit Manna, Ludovic Godet, Rui Cheng, Ziqing Duan, Abhijit Basu Mallick +1 more |
2019-01-29 |
$20,450,000 |
| 10096512 |
Gapfill film modification for advanced CMP and recess flow |
Ludovic Godet, Srinivas D. Nemani, Ellie Yieh |
2018-10-09 |
$16,738,000 |
| 9777378 |
Advanced process flow for high quality FCVD films |
Srinivas D. Nemani, Ludovic Godet, Jun Xue, Ellie Yieh |
2017-10-03 |
$36,306,000 |
| 9773675 |
3D material modification for advanced processing |
Ludovic Godet, Srinivas D. Nemani, Jun Xue, Ellie Yieh, Gary E. Dickerson |
2017-09-26 |
$39,692,000 |
| 9620407 |
3D material modification for advanced processing |
Ludovic Godet, Srinivas D. Nemani, Jun Xue, Ellie Yieh, Gary E. Dickerson |
2017-04-11 |
$31,319,000 |
| 9595467 |
Air gap formation in interconnection structure by implantation process |
Jun Xue, Ludovic Godet, Srinivas D. Nemani, Ellie Yieh |
2017-03-14 |
$16,778,000 |
