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Methods and apparatus for depositing dielectric material |
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| 11955333 |
Methods and apparatus for processing a substrate |
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2024-04-09 |
| 11631591 |
Methods for depositing dielectric material |
Bhargav S. Citla, Jingyi Li, Douglas A. Buchberger, Jr., Zhong Qiang Hua, Srinivas D. Nemani +1 more |
2023-04-18 |
| 11566325 |
Silicon carbonitride gapfill with tunable carbon content |
Mei-Yee Shek, Bhargav S. Citla, Joshua Rubnitz, Chentsau Chris Ying, Srinivas D. Nemani +1 more |
2023-01-31 |
| 11114306 |
Methods for depositing dielectric material |
Bhargav S. Citla, Jingyi Li, Douglas A. Buchberger, Jr., Zhong Qiang Hua, Srinivas D. Nemani +1 more |
2021-09-07 |
| 11049731 |
Methods for film modification |
Erica Chen, Chentsau Chris Ying, Bhargav S. Citla, Matthew August Mattson |
2021-06-29 |
