Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11972943 | Methods and apparatus for depositing dielectric material | Bhargav S. Citla, Srinivas D. Nemani, Joshua Rubnitz | 2024-04-30 |
| 11955333 | Methods and apparatus for processing a substrate | Bhargav S. Citla, Srinivas D. Nemani, Ellie Yieh, Joshua Rubnitz, Erica Chen +3 more | 2024-04-09 |
| 11631591 | Methods for depositing dielectric material | Bhargav S. Citla, Jingyi Li, Douglas A. Buchberger, Jr., Zhong Qiang Hua, Srinivas D. Nemani +1 more | 2023-04-18 |
| 11566325 | Silicon carbonitride gapfill with tunable carbon content | Mei-Yee Shek, Bhargav S. Citla, Joshua Rubnitz, Chentsau Chris Ying, Srinivas D. Nemani +1 more | 2023-01-31 |
| 11114306 | Methods for depositing dielectric material | Bhargav S. Citla, Jingyi Li, Douglas A. Buchberger, Jr., Zhong Qiang Hua, Srinivas D. Nemani +1 more | 2021-09-07 |
| 11049731 | Methods for film modification | Erica Chen, Chentsau Chris Ying, Bhargav S. Citla, Matthew August Mattson | 2021-06-29 |