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Silicon carbonitride gapfill with tunable carbon content |
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Multi-source ion beam etch system |
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Methods for graphene formation using microwave surface-wave plasma on dielectric materials |
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Damage free metal conductor formation |
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Method of etching copper indium gallium selenide (CIGS) material |
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Damage free metal conductor formation |
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Methods for forming fin structures with desired profile for 3D structure semiconductor applications |
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2018-11-13 |
