Silicon carbonitride gapfill with tunable carbon content

Assignee

• Applied Materials

Inventors

• Mei-Yee Shek (32 patents)
• Bhargav S. Citla (20 patents)
• Joshua Rubnitz (6 patents)
• Jethro Tannos (7 patents)
• Chentsau Chris Ying (16 patents)
• Srinivas D. Nemani (236 patents)
• Ellie Yieh (178 patents)

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