Methods for etching a structure for MRAM applications

Assignee

• Applied Materials

Inventors

• Jong Mun Kim (22 patents)
• Minrui Yu (14 patents)
• Chando Park (60 patents)
• Mang-Mang Ling (13 patents)
• Jaesoo Ahn (28 patents)
• Chentsau Chris Ying (16 patents)
• Srinivas D. Nemani (236 patents)
• Mahendra Pakala (74 patents)
• Ellie Yieh (178 patents)

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