Issued Patents All Time
Showing 26–35 of 35 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10319591 | Geometric control of bottom-up pillars for patterning applications | Abhijit Basu Mallick | 2019-06-11 |
| 10319636 | Deposition and treatment of films for patterning | Atashi Basu, Abhijit Basu Mallick, Srinivas Gandikota | 2019-06-11 |
| 10319604 | Methods for self-aligned patterning | Yihong Chen, Abhijit Basu Mallick, Srinivas Gandikota | 2019-06-11 |
| 10192775 | Methods for gapfill in high aspect ratio structures | Pramit Manna, Ludovic Godet, Rui Cheng, Erica Chen, Abhijit Basu Mallick +1 more | 2019-01-29 |
| 10128088 | Graded in-situ charge trapping layers to enable electrostatic chucking and excellent particle performance for boron-doped carbon films | Prashant Kumar Kulshreshtha, Abdul Aziz Khaja, Zheng John Ye, Amit Kumar BANSAL | 2018-11-13 |
| 10100408 | Edge hump reduction faceplate by plasma modulation | Sungwon Ha, Kwangduk Douglas Lee, Ganesh Balasubramanian, Juan Carlos Rocha-Alvarez, Martin Jay Seamons +5 more | 2018-10-16 |
| 10083834 | Methods of forming self-aligned vias | David Thompson, Benjamin Schmiege, Jeffrey W. Anthis, Abhijit Basu Mallick, Susmit Singha Roy | 2018-09-25 |
| 9837265 | Gas flow profile modulated control of overlay in plasma CVD films | Prashant Kumar Kulshreshtha, Sudha Rathi, Praket P. Jha, Saptarshi Basu, Kwangduk Douglas Lee +5 more | 2017-12-05 |
| 9711360 | Methods to improve in-film particle performance of amorphous boron-carbon hardmask process in PECVD system | Kwangduk Douglas Lee, Abdul Aziz Khaja, Amit Kumar BANSAL, Bok Hoen Kim, Prashant Kumar Kulshreshtha | 2017-07-18 |
| 9390910 | Gas flow profile modulated control of overlay in plasma CVD films | Prashant Kumar Kulshreshtha, Sudha Rathi, Praket P. Jha, Saptarshi Basu, Kwangduk Douglas Lee +5 more | 2016-07-12 |