Issued Patents All Time
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12109641 | Optical device having structural and refractive index gradation, and method of fabricating the same | Kang Luo, Ludovic Godet, Daihua Zhang, Nai-Wen Pi, Rami Hourani | 2024-10-08 |
| 11977246 | Mask orientation | Yongan Xu, Rutger Meyer Timmerman Thijssen, Ludovic Godet | 2024-05-07 |
| 11804372 | CD dependent gap fill and conformal films | Jung Chan Lee, Praket P. Jha, Jingmei Liang, Wenhui Li | 2023-10-31 |
| 11629402 | Atomic layer deposition on optical structures | Ludovic Godet, Rutger Meyer Timmerman Thijssen | 2023-04-18 |
| 11630251 | Mask orientation | Yongan Xu, Rutger Meyer Timmerman Thijssen, Ludovic Godet | 2023-04-18 |
| 11572619 | Method of thin film deposition in trenches | Ludovic Godet, Rutger Meyer Timmerman Thijssen, Yongan Xu, Jhenghan YANG, Chien-An Chen | 2023-02-07 |
| 11367614 | Surface roughness for flowable CVD film | Jingmei Liang, Praket P. Jha, Li Zhang | 2022-06-21 |
| 11226440 | Mask orientation | Yongan Xu, Rutger Meyer Timmerman Thijssen, Ludovic Godet | 2022-01-18 |
| 11170990 | Polysilicon liners | Krishna Nittala, Rui Cheng, Karthik Janakiraman, Praket P. Jha, Jingmei Liang | 2021-11-09 |
| 11170994 | CD dependent gap fill and conformal films | Jung Chan Lee, Praket P. Jha, Jingmei Liang, Wenhui Li | 2021-11-09 |
| 11152248 | Cyclic flowable deposition and high-density plasma treatment processes for high quality gap fill solutions | Jingmei Liang, Yong Sun, Praket P. Jha, Jung Chan Lee, Tza-Jing Gung +1 more | 2021-10-19 |
| 10707116 | Cyclic flowable deposition and high-density plasma treatment processes for high quality gap fill solutions | Jingmei Liang, Yong Sun, Praket P. Jha, Jung Chan Lee, Tza-Jing Gung +1 more | 2020-07-07 |
| 10041167 | Cyclic sequential processes for forming high quality thin films | Jingmei Liang, Jung Chan Lee, Mukund Srinivasan | 2018-08-07 |