Methods to eliminate of deposition on wafer bevel and backside

Assignee

• Applied Materials

Inventors

• Venkata Sharat Chandra Parimi (21 patents)
• Zubin Huang (26 patents)
• Manjunath Veerappa Chobari Patil (1 patents)
• Nitin Pathak (13 patents)
• Yi Yang (35 patents)
• Badri Narayan Ramamurthi (30 patents)
• Truong Van Nguyen (6 patents)
• Rui Cheng (70 patents)
• Diwakar Kedlaya (29 patents)

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