Issued Patents All Time
Showing 1–18 of 18 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12334354 | Sidewall passivation for plasma etching | Zhonghua Yao, Qian Fu, Mukund Srinivasan | 2025-06-17 |
| 12237149 | Reducing aspect ratio dependent etch with direct current bias pulsing | Deyang Li, Sunil Srinivasan, Yi-Chuan Chou, Shahid Rauf, Kuan-Ting Liu +5 more | 2025-02-25 |
| 10763142 | System and method for determining field non-uniformities of a wafer processing chamber using a wafer processing parameter | Marcus Musselman, Juan Valdivia, Hua Xiang, Andrew D. Bailey, III, Yoko Yamaguchi +1 more | 2020-09-01 |
| 10446394 | Spacer profile control using atomic layer deposition in a multiple patterning process | Mirzafer Abatchev, Qian Fu, Yoko Yamaguchi | 2019-10-15 |
| 10242883 | High aspect ratio etch of oxide metal oxide metal stack | Joydeep Guha, Sirish Reddy, Kaushik Chattopadhyay, Thomas W. Mountsier, Thorsten Lill +2 more | 2019-03-26 |
| 9899227 | System, method and apparatus for ion milling in a plasma etch chamber | Joydeep Guha, Butsurin Jinnai, Jun Hee HAN | 2018-02-20 |
| 9659783 | High aspect ratio etch with combination mask | Joydeep Guha, Sirish Reddy, Kaushik Chattopadhyay, Thomas W. Mountsier, Thorsten Lill +2 more | 2017-05-23 |
| 9018103 | High aspect ratio etch with combination mask | Joydeep Guha, Sirish Reddy, Kaushik Chattopadhyay, Thomas W. Mountsier, Thorsten Lill +2 more | 2015-04-28 |
| 7682480 | Photoresist conditioning with hydrogen ramping | Keren Jacobs Kanarik | 2010-03-23 |
| 7645707 | Etch profile control | Camelia Rusu, Zhisong Huang, Mukund Srinivasan, Eric A. Hudson | 2010-01-12 |
| 7547635 | Process for etching dielectric films with improved resist and/or etch profile characteristics | Mukund Srinivasan, Robert Chebi | 2009-06-16 |
| 7544521 | Negative bias critical dimension trim | Scott Briggs | 2009-06-09 |
| 7405521 | Multiple frequency plasma processor method and apparatus | Raj Dhindsa, S. M. Reza Sadjadi, Felix Kozakevich, Dave Trussell, Lumin Li +5 more | 2008-07-29 |
| 7135410 | Etch with ramping | Keren Jacobs | 2006-11-14 |
| 7053003 | Photoresist conditioning with hydrogen ramping | Karen Jacobs Kanarik | 2006-05-30 |
| 6921724 | Variable temperature processes for tunable electrostatic chuck | Tom A. Kamp, Richard A. Gottscho, Steve Lee, Chris Lee, Yoko Yamaguchi +1 more | 2005-07-26 |
| 6824627 | Stepped upper electrode for plasma processing uniformity | Rajinder Dhindsa, Mukund Srinivasan, Eric H. Lenz | 2004-11-30 |
| 6391787 | Stepped upper electrode for plasma processing uniformity | Rajinder Dhindsa, Mukund Srinivasan, Eric H. Lenz | 2002-05-21 |