Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11935730 | Systems and methods for cleaning an edge ring pocket | Eric A. Hudson, John Holland, Alexei Marakhtanov, Felix Kozakevich, Kenneth Lucchesi | 2024-03-19 |
| 9673058 | Method for etching features in dielectric layers | Eric A. Hudson, Leonid Belau, John Holland, Mark Wilcoxson | 2017-06-06 |
| 8708134 | Star wheel conveyor outfeed mechanism and method | Stephen M. Giometti, Timothy W. Shay | 2014-04-29 |
| 8548771 | Out-of-round container detection system and method | Carl L. Holden | 2013-10-01 |
| 7544521 | Negative bias critical dimension trim | Aaron Eppler | 2009-06-09 |
| 6930048 | Etching a metal hard mask for an integrated circuit structure | Siyi Li, S.M. Sadjadi, Sean S. Kang, Tri C. Le, Bi-Ming Yen | 2005-08-16 |