LB

Leonid Belau

Lam Research: 5 patents #568 of 2,128Top 30%
Overall (All Time): #914,546 of 4,157,543Top 25%
5
Patents All Time

Issued Patents All Time

Patent #TitleCo-InventorsDate
12412736 Methods and systems for managing byproduct material accumulation during plasma-based semiconductor wafer fabrication process Alexei Marakhtanov, Eric A. Hudson, John Holland 2025-09-09
12406852 Profile optimization for high aspect ratio memory using an etch front metal catalyst Eric A. Hudson 2025-09-02
12354880 High aspect ratio etch with infinite selectivity Eric A. Hudson 2025-07-08
10847374 Method for etching features in a stack Eric A. Hudson, Francis Sloan Roberts 2020-11-24
9673058 Method for etching features in dielectric layers Scott Briggs, Eric A. Hudson, John Holland, Mark Wilcoxson 2017-06-06