Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5308447 | Endpoint and uniformity determinations in material layer processing through monitoring multiple surface regions across the layer | Richard E. Howard, Herbert E. Litvak | 1994-05-03 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5308447 | Endpoint and uniformity determinations in material layer processing through monitoring multiple surface regions across the layer | Richard E. Howard, Herbert E. Litvak | 1994-05-03 |