Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Dual wavelength sensor which employs object as part of a corner reflector

Dual wavelength sensor which employs object as part of a corner reflector

US Patent 4697089 · Granted Sep 29, 1987

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Temperature controlled chuck for elevated temperature etch processing1990
Plasma Reactor with removable insert1988
Magnetically coupled wafer lift pins1988
Non-uniform gas inlet for dry etching apparatus1988
Plasma reactor having slotted manifold1986
Infrared proximity detecting apparatus1980