Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4861222 | Cassette elevator for use in a modular article processing machine | — | 1989-08-29 |
| 4801241 | Modular article processing machine and method of article handling therein | John Zajac, Thomas M. Rathmann, Roger B. Lachenbruch | 1989-01-31 |
| 4727993 | Wafer cassette having multi-directional access | John Zajac | 1988-03-01 |
| 4632624 | Vacuum load lock apparatus | John Zajac | 1986-12-30 |
| 4619573 | Article transport apparatus | Thomas M. Rathmann, Herbert G. Drake, Jr., Roger B. Lachenbruch | 1986-10-28 |
| 4547247 | Plasma reactor chuck assembly | Douglas H. Warenback, Thomas M. Rathmann | 1985-10-15 |