Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9443716 | Precise critical dimension control using bilayer ALD | Kenji Takeshita, Nobuhiro Sakamoto, Li-Qun Xia, Mandyam Sriram | 2016-09-13 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9443716 | Precise critical dimension control using bilayer ALD | Kenji Takeshita, Nobuhiro Sakamoto, Li-Qun Xia, Mandyam Sriram | 2016-09-13 |