Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7193173 | Reducing plasma ignition pressure | Bradford J. Lyndaker, Andras Kuthi, Andreas Fischer | 2007-03-20 |
| 6562187 | Methods and apparatus for determining an etch endpoint in a plasma processing system | Jaroslaw W. Winniczek, M. J. Francois Chandrasekar Dassapa, Eric A. Hudson | 2003-05-13 |
| 6228278 | Methods and apparatus for determining an etch endpoint in a plasma processing system | Jaroslaw W. Winniczek, M. J. Francois Chandrasekar Dassapa, Eric A. Hudson | 2001-05-08 |