Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6562187 | Methods and apparatus for determining an etch endpoint in a plasma processing system | Jaroslaw W. Winniczek, Eric A. Hudson, Mark Wiepking | 2003-05-13 |
| 6228278 | Methods and apparatus for determining an etch endpoint in a plasma processing system | Jaroslaw W. Winniczek, Eric A. Hudson, Mark Wiepking | 2001-05-08 |