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Lam Research: 1 patents #1,364 of 2,128Top 65%
Overall (All Time): #3,055,981 of 4,157,543Top 75%
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Patent #TitleCo-InventorsDate
9051647 Tunable multi-zone gas injection system David Cooperberg, Douglas Ratto, Harmeet Singh, Neil Benjamin 2015-06-09