Issued Patents All Time
Showing 51–75 of 78 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7802917 | Method and apparatus for chuck thermal calibration | Keith Gaff | 2010-09-28 |
| 7578616 | Apparatus for determining a temperature of a substrate and methods therefor | Keith Gaff | 2009-08-25 |
| 7571697 | Plasma processor coil | David Cooperberg | 2009-08-11 |
| 7497614 | Apparatus for determining a temperature of a substrate and methods therefor | Keith Gaff | 2009-03-03 |
| 7274004 | Method and apparatus for controlling the spatial temperature distribution across the surface of a workpiece support | Robert Steger | 2007-09-25 |
| 7254510 | Smart component-based management techniques in a substrate processing system | Richard A. Gottscho, Nicolas Bright, Robert Steger | 2007-08-07 |
| 7152011 | Smart component-based management techniques in a substrate processing system | Richard A. Gottscho, Nicolas Bright, Robert Steger | 2006-12-19 |
| 7080941 | Temperature sensing system for temperature measurement in a high radio frequency environment | Charles Ross, Rory Babb | 2006-07-25 |
| 6974550 | Apparatus and method for controlling the voltage applied to an electrostatic shield used in a plasma generator | Andras Kuthi | 2005-12-13 |
| 6972579 | Wafer integrated plasma probe assembly array | — | 2005-12-06 |
| 6952255 | System and method for integrated multi-use optical alignment | Andrew Perry, Robert Steger | 2005-10-04 |
| 6920312 | RF generating system with fast loop control | — | 2005-07-19 |
| 6901808 | Capacitive manometer having reduced process drift | Leonard J. Sharpless, Jeffrey W. Fish | 2005-06-07 |
| 6847014 | Method and apparatus for controlling the spatial temperature distribution across the surface of a workpiece support | Robert Steger | 2005-01-25 |
| 6821378 | Pump baffle and screen to improve etch uniformity | John Daugherty, Song Huang | 2004-11-23 |
| 6781393 | Methods relating to wafer integrated plasma probe assembly arrays | — | 2004-08-24 |
| 6653852 | Wafer integrated plasma probe assembly array | — | 2003-11-25 |
| 6592710 | Apparatus for controlling the voltage applied to an electrostatic shield used in a plasma generator | Andras Kuthi | 2003-07-15 |
| 6563076 | Voltage control sensor and control interface for radio frequency power regulation in a plasma reactor | Scott Baldwin, Seyed Jafar Jafarian-Tehrani | 2003-05-13 |
| 6509542 | Voltage control sensor and control interface for radio frequency power regulation in a plasma reactor | Scott Baldwin, Seyed Jafar Jafarian-Tehrani | 2003-01-21 |
| 6483690 | Ceramic electrostatic chuck assembly and method of making | Shu Nakajima | 2002-11-19 |
| 6344105 | Techniques for improving etch rate uniformity | John Daugherty, Jeff A. Bogart, Vahid Vahedi, David Cooperberg, Alan J. Miller +1 more | 2002-02-05 |
| 6168690 | Methods and apparatus for physical vapor deposition | Russell F. Jewett, Andrew Perry, Vahid Vahedi | 2001-01-02 |
| 6087778 | Scalable helicon wave plasma processing device with a non-cylindrical source chamber having a serpentine antenna | Stefano Mangano, Russell F. Jewett | 2000-07-11 |
| 5863376 | Temperature controlling method and apparatus for a plasma processing chamber | Thomas E. Wicker, Joel M. Cook, Robert A. Maraschin, William S. Kennedy | 1999-01-26 |