Issued Patents All Time
Showing 26–50 of 78 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9824904 | Method and apparatus for controlling spatial temperature distribution | Robert Steger | 2017-11-21 |
| 9775194 | Multiplexed heater array using AC drive for semiconductor processing | John Pease | 2017-09-26 |
| 9767996 | Application of powered electrostatic faraday shield to recondition dielectric window in ICP plasmas | Robert Griffith O'Neill, Jie Zhang | 2017-09-19 |
| 9673025 | Electrostatic chuck including embedded faraday cage for RF delivery and associated methods for operation, monitoring, and control | Henry Povolny, Anthony J. Ricci | 2017-06-06 |
| 9646861 | Heating plate with heating zones for substrate processing and method of use thereof | Harmeet Singh, Keith Gaff, Keith Comendant | 2017-05-09 |
| 9530679 | Method and apparatus for chuck thermal calibration | Keith Gaff | 2016-12-27 |
| 9392643 | Heating plate with planar heater zones for semiconductor processing | Harmeet Singh, Keith Gaff, Keith Comendant | 2016-07-12 |
| 9287096 | Methods and apparatus for a hybrid capacitively-coupled and an inductively-coupled plasma processing system | Alexei Marakhtanov, Eric A. Hudson, Rajinder Dhindsa | 2016-03-15 |
| 9174296 | Plasma ignition and sustaining methods and apparatuses | Andreas Fischer | 2015-11-03 |
| 9105449 | Distributed power arrangements for localizing power delivery | — | 2015-08-11 |
| 9051647 | Tunable multi-zone gas injection system | David Cooperberg, Valid Vahedi, Douglas Ratto, Harmeet Singh | 2015-06-09 |
| 8991331 | Integrated steerability array arrangement for minimizing non-uniformity and methods thereof | — | 2015-03-31 |
| 8963052 | Method for controlling spatial temperature distribution across a semiconductor wafer | Robert Steger | 2015-02-24 |
| 8921740 | Method and apparatus for controlling the spatial temperature distribution across the surface of a workpiece support | Robert Steger | 2014-12-30 |
| 8884178 | Methods and apparatus for igniting and sustaining plasma | Andreas Fischer | 2014-11-11 |
| 8884194 | Heating plate with planar heater zones for semiconductor processing | Harmeet Singh, Keith Gaff, Keith Comendant | 2014-11-11 |
| 8809747 | Current peak spreading schemes for multiplexed heated array | John Pease | 2014-08-19 |
| 8755204 | RF isolation for power circuitry | — | 2014-06-17 |
| 8736175 | Current control in plasma processing systems | Maolin Long, Seyed Jafar Jafarian-Tehrani, Arthur H. Sato, Norman Williams | 2014-05-27 |
| 8692467 | Synchronized and shortened master-slave RF pulsing in a plasma processing chamber | Arthur H. Sato | 2014-04-08 |
| 8637794 | Heating plate with planar heating zones for semiconductor processing | Harmeet Singh, Keith Gaff, Keith Comendant | 2014-01-28 |
| 8536494 | Method and apparatus for controlling the spatial temperature distribution across the surface of a workpiece support | Robert Steger | 2013-09-17 |
| 8528498 | Integrated steerability array arrangement for minimizing non-uniformity | — | 2013-09-10 |
| 8449174 | Method and apparatus for chuck thermal calibration | Keith Gaff | 2013-05-28 |
| 8271121 | Methods and arrangements for in-situ process monitoring and control for plasma processing tools | Vijayakumar C. Venugopal | 2012-09-18 |