Issued Patents All Time
Showing 76–78 of 78 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5820723 | Universal vacuum chamber including equipment modules such as a plasma generating source, vacuum pumping arrangement and/or cantilevered substrate support | Jon P. Hylbert, Stefano Mangano | 1998-10-13 |
| 5793192 | Methods and apparatuses for clamping and declamping a semiconductor wafer in a wafer processing system | Marc B. Kubly, Steven Douglas Germain | 1998-08-11 |
| 5708250 | Voltage controller for electrostatic chuck of vacuum plasma processors | Seyed Jafar Jafarian-Tehrani, Max T. Artusy | 1998-01-13 |