Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7080941 | Temperature sensing system for temperature measurement in a high radio frequency environment | Neil Benjamin, Rory Babb | 2006-07-25 |
| 5835335 | Unbalanced bipolar electrostatic chuck power supplies and methods thereof | Canfeng Lai | 1998-11-10 |