Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12085152 | Apparatus and method for converting between linear and rotary motion and systems involving the same | — | 2024-09-10 |
| 11536353 | Apparatus and method for converting between linear and rotary motion and systems involving the same | — | 2022-12-27 |
| 9005363 | Crystalline film devices, apparatuses for and methods of fabrication | Steven Franklin Pugh, Paul Wickboldt | 2015-04-14 |
| 8357242 | Crystalline film devices, apparatuses for and methods of fabrication | Steven Franklin Pugh, Paul Wickboldt | 2013-01-22 |
| 6696662 | Methods and apparatus for plasma processing | Jason Elston | 2004-02-24 |
| 6392210 | Methods and apparatus for RF power process operations with automatic input power control | Curtis Charles Camus | 2002-05-21 |
| 6326584 | Methods and apparatus for RF power delivery | Curtis Charles Camus | 2001-12-04 |
| 6291938 | Methods and apparatus for igniting and sustaining inductively coupled plasma | Curtis Charles Camus | 2001-09-18 |
| 6168690 | Methods and apparatus for physical vapor deposition | Neil Benjamin, Andrew Perry, Vahid Vahedi | 2001-01-02 |
| 6156667 | Methods and apparatus for plasma processing | — | 2000-12-05 |
| 6087778 | Scalable helicon wave plasma processing device with a non-cylindrical source chamber having a serpentine antenna | Neil Benjamin, Stefano Mangano | 2000-07-11 |
| 5889252 | Method of and apparatus for independently controlling electric parameters of an impedance matching network | Norman E. Williams | 1999-03-30 |