Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8755165 | Fault tolerant ion source power system | Dennis John Hansen, James D. Deakins | 2014-06-17 |
| 6392210 | Methods and apparatus for RF power process operations with automatic input power control | Russell F. Jewett | 2002-05-21 |
| 6326584 | Methods and apparatus for RF power delivery | Russell F. Jewett | 2001-12-04 |
| 6291938 | Methods and apparatus for igniting and sustaining inductively coupled plasma | Russell F. Jewett | 2001-09-18 |