Issued Patents All Time
Showing 51–62 of 62 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10153139 | Multiple electrode substrate support assembly and phase control system | Kartik Ramaswamy, Steven Lane, Lawrence Wong, Shahid Rauf, Andrew Nguyen +2 more | 2018-12-11 |
| 10141166 | Method of real time in-situ chamber condition monitoring using sensors and RF communication | Lawrence Wong, Kartik Ramaswamy, Steven Lane, Richard Fovell | 2018-11-27 |
| 10115566 | Method and apparatus for controlling a magnetic field in a plasma chamber | Steven Lane, Tza-Jing Gung, Kartik Ramaswamy, Travis Koh, Joseph AuBuchon | 2018-10-30 |
| 10017857 | Method and apparatus for controlling plasma near the edge of a substrate | Andrew Nguyen, Kartik Ramaswamy, Steven Lane, Lawrence Wong | 2018-07-10 |
| 9912926 | Biochemistry measurement device and method thereof | Hong-Ru Guo, Yu-Jin Kao | 2018-03-06 |
| 9659751 | System and method for selective coil excitation in inductively coupled plasma processing reactors | Kartik Ramaswamy, Steven Lane, Lawrence Wong, Joseph AuBuchon, Travis Koh | 2017-05-23 |
| 9613783 | Method and apparatus for controlling a magnetic field in a plasma chamber | Steven Lane, Tza-Jing Gung, Kartik Ramaswamy, Travis Koh, Joseph AuBuchon | 2017-04-04 |
| 9472379 | Method of multiple zone symmetric gas injection for inductively coupled plasma | Steven Lane, Kartik Ramaswamy, Lawrence Wong | 2016-10-18 |
| 9449794 | Symmetrical inductively coupled plasma source with side RF feeds and spiral coil antenna | Andrew Nguyen, Kartik Ramaswamy, Jason A. Kenney, Shahid Rauf, Kenneth S. Collins +2 more | 2016-09-20 |
| 9412563 | Spatially discrete multi-loop RF-driven plasma source having plural independent zones | Kartik Ramaswamy, Kenneth S. Collins, Shahid Rauf, Steven Lane, Lawrence Wong | 2016-08-09 |
| 9161428 | Independent control of RF phases of separate coils of an inductively coupled plasma reactor | Kenneth S. Collins, Satoru Kobayashi, Lawrence Wong, Jonathan Liu, Kartik Ramaswamy +1 more | 2015-10-13 |
| 8734664 | Method of differential counter electrode tuning in an RF plasma reactor | Kartik Ramaswamy, Kenneth S. Collins, Steven Lane, Douglas A. Buchberger, Jr., Lawrence Wong +1 more | 2014-05-27 |