Issued Patents All Time
Showing 51–59 of 59 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6033478 | Wafer support with improved temperature control | — | 2000-03-07 |
| 6015465 | Temperature control system for semiconductor process chamber | Ke Ling Lee, Maya Shendon, Efrain Quiles | 2000-01-18 |
| 5942039 | Self-cleaning focus ring | Steve S. Y. Mak | 1999-08-24 |
| 5900064 | Plasma process chamber | — | 1999-05-04 |
| 5885469 | Topographical structure of an electrostatic chuck and method of fabricating same | Alexander Veytser | 1999-03-23 |
| 5856906 | Backside gas quick dump apparatus for a semiconductor wafer processing system | Maya Shendon, Gary Hsueh, James E. Sammons, III | 1999-01-05 |
| 5801915 | Electrostatic chuck having a unidirectionally conducting coupler layer | Alexander Veytser, Shamouil Shamouilian | 1998-09-01 |
| 5356158 | Resilient rotary seal with projecting edge | Brian Simmons, Michael Rivkin | 1994-10-18 |
| 5292137 | Rotary shaft sealing method and device | Brian Simmons, Leonid Zeltser | 1994-03-08 |