Issued Patents All Time
Showing 26–50 of 59 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6689418 | Apparatus for wafer rinse and clean and edge etching | Donald Olgado, Avi Tepman, Yeuk-Fai Edwin Mok | 2004-02-10 |
| 6676760 | Process chamber having multiple gas distributors and method | Dan Katz, Wing Cheng | 2004-01-13 |
| 6583980 | Substrate support tolerant to thermal expansion stresses | You Wang, Shamouil Shamouilian, Alexander Veytser, Wing Cheng | 2003-06-24 |
| 6572814 | Method of fabricating a semiconductor wafer support chuck apparatus having small diameter gas distribution ports for distributing a heat transfer gas | Shamouil Shamoulian, Senh Thach, Wing Cheng | 2003-06-03 |
| 6538872 | Electrostatic chuck having heater and method | You Wang, Shamouil Shamouilian, Alexander Veytser, Surinder Bedi, Kadthala Ramaya Narendrnath +4 more | 2003-03-25 |
| 6503368 | Substrate support having bonded sections and method | Vijay D. Parkhe, Shamouil Shamouilian, You Wang, Wing Cheng, Alexander Veytser | 2003-01-07 |
| 6490146 | Electrostatic chuck bonded to base with a bond layer and method | You Wang, Shamouil Shamouilian, Alexander Veytser, Surinder Bedi, Kadthala Ramaya Narendrnath +4 more | 2002-12-03 |
| 6490145 | Substrate support pedestal | You Wang, Tony Kaushal, Semyon L. Kats | 2002-12-03 |
| 6478924 | Plasma chamber support having dual electrodes | Shamouil Shamouilian, Kwok Manus Wong, Liang Wang, Alexander Veytser, Dennis S. Grimard | 2002-11-12 |
| 6471822 | Magnetically enhanced inductively coupled plasma reactor with magnetically confined plasma | Gerald Yin, Peter Loewenhardt, Hong Chin Shan, Chii Guang Lee, Dan Katz | 2002-10-29 |
| 6464790 | Substrate support member | Semyon Sherstinsky, Calvin Augason, Samuel Wilson, Michael Stanley Phillips, Leonel A. Zuniga | 2002-10-15 |
| 6464795 | Substrate support member for a processing chamber | Semyon Sherstinsky, Calvin Augason, Leonel A. Zuniga, Jun Zhao, Talex Sajoto +5 more | 2002-10-15 |
| 6462928 | Electrostatic chuck having improved electrical connector and method | Shamouil Shamouilian, You Wang, Surinder Bedi, Alexander Veytser, Kadthala Ramaya Narendrnath +4 more | 2002-10-08 |
| 6449871 | Semiconductor process chamber having improved gas distributor | Dmitry Lubomirsky, Guang-Jye Shiau, Peter Loewenhardt, Shamouil Shamouilian | 2002-09-17 |
| 6414834 | Dielectric covered electrostatic chuck | Edwin C. Weldon, Kenneth S. Collins, Arik Donde, Brian Lue, Dan Maydan +8 more | 2002-07-02 |
| 6320736 | Chuck having pressurized zones of heat transfer gas | Shamouil Shamouilian, Siamak Salimian, Hamid Noorbakhsh, Efrain Quiles, Dennis S. Grimard | 2001-11-20 |
| 6310755 | Electrostatic chuck having gas cavity and method | Shamouil Shamouilian, You Wang, Wing Cheng, Alexander Veytser, Surinder Bedi +4 more | 2001-10-30 |
| 6278600 | Electrostatic chuck with improved temperature control and puncture resistance | Shamouil Shamouilian, Semyon L. Kats, Semyon Sherstinsky, Jon Clinton, Surinder Bedi | 2001-08-21 |
| 6267839 | Electrostatic chuck with improved RF power distribution | Shamouil Shamouilian, Ananda H. Kumar | 2001-07-31 |
| 6189484 | Plasma reactor having a helicon wave high density plasma source | Gerald Yin, Chii Guang Lee, Peter Loewenhardt, Hongching Shan, Diana Xiaobing Ma +1 more | 2001-02-20 |
| 6185839 | Semiconductor process chamber having improved gas distributor | Dmitry Lubomirsky, Guang-Jye Shiau, Peter Loewenhardt, Shamouil Shamouilian | 2001-02-13 |
| 6151203 | Connectors for an electrostatic chuck and combination thereof | Shamouil Shamouilian, Ananda H. Kumar, Dennis S. Grimard, Liang Wang, Gerhard Schneider +4 more | 2000-11-21 |
| 6108189 | Electrostatic chuck having improved gas conduits | Edwin C. Weldon, Kenneth S. Collins, Arik Donde, Brian Lue, Dan Maydan +8 more | 2000-08-22 |
| 6095084 | High density plasma process chamber | Shamouil Shamouilian, Ananda H. Kumar, Dennis S. Grimard, Jonathan D. Mohn, Michael G. Chafin +1 more | 2000-08-01 |
| 6094334 | Polymer chuck with heater and method of manufacture | Surinder Bedi, Shamouil Shamouilian, Syed H. Askari, Jon Clinton, Alexander Veytser +2 more | 2000-07-25 |