Issued Patents All Time
Showing 26–35 of 35 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7696117 | Method and apparatus which reduce the erosion rate of surfaces exposed to halogen-containing plasmas | Jennifer Y. Sun, Ren-Guan Duan, Jie Yuan, Kenneth S. Collins | 2010-04-13 |
| 7547569 | Method for patterning Mo layer in a photovoltaic device comprising CIGS material using an etch process | Timothy Weidman, Peter G. Borden | 2009-06-16 |
| 7479304 | Gas distribution plate fabricated from a solid yttrium oxide-comprising substrate | Jennifer Y. Sun, Senh Thach, James Dempster, Thanh Pham | 2009-01-20 |
| 7371467 | Process chamber component having electroplated yttrium containing coating | Nianci Han, Hong Shih, Yang Zhang, Danny Lu, Jennifer Y. Sun | 2008-05-13 |
| 6942929 | Process chamber having component with yttrium-aluminum coating | Nianci Han, Hong Shih | 2005-09-13 |
| 6623595 | Wavy and roughened dome in plasma processing reactor | Nianci Han, Hong Shih, Yan Ye | 2003-09-23 |
| 6508911 | Diamond coated parts in a plasma reactor | Nianci Han, Hong Shih, Jennifer Y. Sun | 2003-01-21 |
| 6476398 | Beam automation in charged-particle-beam systems | Richard Barnard | 2002-11-05 |
| 6413389 | Method for recovering metal from etch by-products | Hong Shih, Danny Lu, Nianci Han, Diana Xiaobing Ma | 2002-07-02 |
| 6352081 | Method of cleaning a semiconductor device processing chamber after a copper etch process | Danny Lu, Allen Zhao, Peter Hsieh, Hong Shih, Yan Ye | 2002-03-05 |