Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10669627 | Multi-layer deposition system and process | Yang Yun, Max Sorenson, Chien-Lan Hsueh, Tining Su, Alex Anderson +1 more | 2020-06-02 |
| 8067067 | Clean, dense yttrium oxide coating protecting semiconductor processing apparatus | Jennifer Y. Sun, Senh Thach, Li Xu | 2011-11-29 |