Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date | Approx Value ⓘ |
|---|---|---|---|---|
| 8475625 | Apparatus for etching high aspect ratio features | Sharma Pamarthy, Huutri Dao, Xiaoping Zhou, Kelly A. McDonough, Jivko Dinev +9 more | 2013-07-02 | $11,179,000 |
| 7718029 | Self-passivating plasma resistant material for joining chamber components | Jennifer Y. Sun, Li Xu, Senh Thach, Kelly A. McDonough | 2010-05-18 | $6,103,000 |