Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12203828 | Method and system for detecting anomalies in a semiconductor processing system | Ryan T. DOWNEY, Hemant P. Mungekar, James L'HEUREUX, Andreas Neuber, Michael W. Johnson +5 more | 2025-01-21 |
| 12065359 | Portable fluorine generator for on-site calibration | — | 2024-08-20 |
| 11551917 | Reduction of Br2 and Cl2 in semiconductor processes | James L'HEUREUX | 2023-01-10 |