Issued Patents All Time
Showing 26–50 of 112 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11673298 | Casting method for encapsulating an electrical component | Louis G. Campbell | 2023-06-13 |
| 11670492 | Chamber configurations and processes for particle control | Fei Wu, Abdul Aziz Khaja, Sungwon Ha, Vinay Prabhakar | 2023-06-06 |
| 11646216 | Systems and methods of seasoning electrostatic chucks with dielectric seasoning films | Akhil Singhal, Allison Yau, Zeqiong Zhao, Sang Jin Kim, Zhijun Jiang +1 more | 2023-05-09 |
| 11613812 | PECVD process | Nagarajan Rajagopalan, Xinhai Han, Michael Wenyoung Tsiang, Masaki Ogata, Zhijun Jiang +17 more | 2023-03-28 |
| 11592812 | Sensor metrology data integration | Sidharth Bhatia, Garrett H. Sin, Heng-Cheng Pai, Pramod Nambiar, Irfan Jamil | 2023-02-28 |
| 11560623 | Methods of reducing chamber residues | Liangfa Hu, Prashant Kumar Kulshreshtha, Anjana M. Patel, Abdul Aziz Khaja, Viren Kalsekar +5 more | 2023-01-24 |
| 11545376 | Plasma parameters and skew characterization by high speed imaging | Sidharth Bhatia, Edward P. Hammond, IV, Bhaskar Kumar, Anup K. Singh, Vivek Shah | 2023-01-03 |
| 11515191 | Graded dimple height pattern on heater for lower backside damage and low chucking voltage | Vivek Shah, Bhaskar Kumar | 2022-11-29 |
| 11495440 | Plasma density control on substrate edge | Bhaskar Kumar, Prashanth Kothnur, Sidharth Bhatia, Anup K. Singh, Vivek Shah +1 more | 2022-11-08 |
| 11488811 | Chucking process and system for substrate processing chambers | Bhaskar Kumar, Vivek Shah, Jiheng Zhao | 2022-11-01 |
| 11451389 | Multi-encrypted message response manager | Madhusudhanan Krishnamoorthy | 2022-09-20 |
| 11437262 | Wafer de-chucking detection and arcing prevention | Byung Chul Yoon, Hemant P. Mungekar | 2022-09-06 |
| 11318642 | Permeable wall encapsulation mold | Louis G. Campbell | 2022-05-03 |
| 11276562 | Plasma processing using multiple radio frequency power feeds for improved uniformity | Zheng John Ye, Thuy Britcher, Jay D. Pinson, II, Hiroji Hanawa, Juan Carlos Rocha-Alvarez +4 more | 2022-03-15 |
| 11145504 | Method of forming film stacks with reduced defects | Zhijun Jiang, Arkajit Roy Barman, Hidehiro Kojiri, Xinhai Han, Deenesh Padhi +8 more | 2021-10-12 |
| 11136665 | Shadow ring for modifying wafer edge and bevel deposition | Dale Du Bois, Mohamad A. Ayoub, Robert W. Kim, Amit Kumar BANSAL, Mark Fodor +6 more | 2021-10-05 |
| 11133210 | Dual temperature heater | Dale R. Du Bois, Juan Carlos Rocha-Alvarez, Sanjeev Baluja, Lipyeow Yap, Jianhua Zhou +1 more | 2021-09-28 |
| 11122021 | Server for handling multi-encrypted messages | Madhusudhanan Krishnamoorthy | 2021-09-14 |
| 11120976 | Apparatus and methods for removing contaminant particles in a plasma process | Bhaskar Kumar, Anup K. Singh, Vivek Shah, Sidharth Bhatia | 2021-09-14 |
| 11069514 | Remote capacitively coupled plasma source with improved ion blocker | Vivek Shah, Vinayak Vishwanath Hassan, Bhaskar Kumar | 2021-07-20 |
| 11031262 | Loadlock integrated bevel etcher system | Saptarshi Basu, Jeongmin Lee, Paul Connors, Dale R. Du Bois, Prashant Kumar Kulshreshtha +12 more | 2021-06-08 |
| 11024522 | Virtual sensor for spatially resolved wafer temperature control | Hemant P. Mungekar, Uwe Haller | 2021-06-01 |
| 11004710 | Wafer placement error detection based on measuring a current through an electrostatic chuck and solution for intervention | Hemant P. Mungekar | 2021-05-11 |
| 10971390 | Methods of minimizing wafer backside damage in semiconductor wafer processing | Abdul Aziz Khaja, Liangfa Hu, Sudha Rathi | 2021-04-06 |
| 10910227 | Bottom and side plasma tuning having closed loop control | Juan Carlos Rocha-Alvarez, Amit Kumar BANSAL, Jianhua Zhou, Ramprakash Sankarakrishnan, Mohamad A. Ayoub +1 more | 2021-02-02 |