Issued Patents All Time
Showing 51–75 of 112 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10892143 | Technique to prevent aluminum fluoride build up on the heater | Vivek Shah, Bhaskar Kumar, Anup K. Singh | 2021-01-12 |
| 10804044 | Electrical contact alloy for vacuum contactors | Louis G. Campbell, Benjamin A. Rosenkrans | 2020-10-13 |
| 10796867 | Coil-type axial magnetic field contact assembly for vacuum interrupter | Wangpei Li, Eric Dennis Smith, Xin Zhou, Louis G. Campbell, Darron Robert Mohr +1 more | 2020-10-06 |
| 10793954 | PECVD process | Nagarajan Rajagopalan, Xinhai Han, Michael Wenyoung Tsiang, Masaki Ogata, Zhijun Jiang +17 more | 2020-10-06 |
| 10790121 | Plasma density control on substrate edge | Bhaskar Kumar, Prashanth Kothnur, Sidharth Bhatia, Anup K. Singh, Vivek Shah +1 more | 2020-09-29 |
| 10755903 | RPS defect reduction by cyclic clean induced RPS cooling | Sidharth Bhatia, Zhili Zuo, Hidehiro Kojiri, Anjana M. Patel, Song-Moon Suh | 2020-08-25 |
| 10748797 | Plasma parameters and skew characterization by high speed imaging | Sidharth Bhatia, Edward P. Hammond, IV, Bhaskar Kumar, Anup K. Singh, Vivek Shah | 2020-08-18 |
| 10714319 | Apparatus and methods for removing contaminant particles in a plasma process | Bhaskar Kumar, Anup K. Singh, Vivek Shah, Sidharth Bhatia | 2020-07-14 |
| 10688538 | Aluminum fluoride mitigation by plasma treatment | Vivek Shah, Anup K. Singh, Bhaskar Kumar, Bok Hoen Kim | 2020-06-23 |
| 10636684 | Loadlock integrated bevel etcher system | Saptarshi Basu, Jeongmin Lee, Paul Connors, Dale R. Du Bois, Prashant Kumar Kulshreshtha +12 more | 2020-04-28 |
| 10636630 | Processing chamber and method with thermal control | Hemant P. Mungekar, Yoichi Suzuki, Abdul Aziz Khaja | 2020-04-28 |
| 10600624 | System and method for substrate processing chambers | Kalyanjit Ghosh, Sanjeev Baluja, Mayur Govind Kulkarni, Shailendra Srivastava, Tejas Ulavi +9 more | 2020-03-24 |
| 10580623 | Plasma processing using multiple radio frequency power feeds for improved uniformity | Zheng John Ye, Thuy Britcher, Jay D. Pinson, II, Hiroji Hanawa, Juan Carlos Rocha-Alvarez +4 more | 2020-03-03 |
| 10544508 | Controlling temperature in substrate processing systems | Juan Carlos Rocha-Alvarez, Amit Kumar BANSAL, Jianhua Zhou, Ramprakash Sankarakrishnan | 2020-01-28 |
| 10468205 | Electrical contact alloy for vacuum contactors | Louis G. Campbell, Benjamin A. Rosenkrans | 2019-11-05 |
| 10403515 | Loadlock integrated bevel etcher system | Saptarshi Basu, Jeongmin Lee, Paul Connors, Dale R. Du Bois, Prashant Kumar Kulshreshtha +12 more | 2019-09-03 |
| 10403535 | Method and apparatus of processing wafers with compressive or tensile stress at elevated temperatures in a plasma enhanced chemical vapor deposition system | Zheng John Ye, Jay D. Pinson, II, Hiroji Hanawa, Jianhua Zhou, Xing Lin +11 more | 2019-09-03 |
| 10385448 | Apparatus and method for purging gaseous compounds | Juan Carlos Rocha-Alvarez, Amit Kumar BANSAL, Jianhua Zhou, Ramprakash Sankarakrishnan | 2019-08-20 |
| 10373822 | Gas flow profile modulated control of overlay in plasma CVD films | Prashant Kumar Kulshreshtha, Sudha Rathi, Praket P. Jha, Saptarshi Basu, Kwangduk Douglas Lee +5 more | 2019-08-06 |
| 10325800 | High temperature electrostatic chucking with dielectric constant engineered in-situ charge trap materials | Prashant Kumar Kulshreshtha, Kwangduk Douglas Lee, Bok Hoen Kim, Zheng John Ye, Swayambhu Prasad Behera +2 more | 2019-06-18 |
| 10325799 | Dual temperature heater | Dale R. Du Bois, Juan Carlos Rocha-Alvarez, Sanjeev Baluja, Lipyeow Yap, Jianhua Zhou +1 more | 2019-06-18 |
| 10276353 | Dual-channel showerhead for formation of film stacks | Kaushik Alayavalli, Xinhai Han, Praket P. Jha, Masaki Ogata, Zhijun Jiang +6 more | 2019-04-30 |
| 10227695 | Shadow ring for modifying wafer edge and bevel deposition | Dale R. Du Bois, Mohamad A. Ayoub, Robert W. Kim, Amit Kumar BANSAL, Mark Fodor +6 more | 2019-03-12 |
| 10161035 | Apparatus and method for purging gaseous compounds | Juan Carlos Rocha-Alvarez, Amit Kumar BANSAL, Jianhua Zhou, Ramprakash Sankarakrishnan | 2018-12-25 |
| 10128118 | Bottom and side plasma tuning having closed loop control | Juan Carlos Rocha-Alvarez, Amit Kumar BANSAL, Jianhua Zhou, Ramprakash Sankarakrishnan, Mohamad A. Ayoub +1 more | 2018-11-13 |