Issued Patents All Time
Showing 101–112 of 112 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7922440 | Apparatus and method for centering a substrate in a process chamber | Dale R. Du Bois, Mark Fodor, Chiu Chan, Karthik Janakiraman | 2011-04-12 |
| 7867578 | Method for depositing an amorphous carbon film with improved density and step coverage | Deenesh Padhi, Hyoung-Chan Ha, Sudha Rathi, Derek R. Witty, Chiu Chan +6 more | 2011-01-11 |
| 7829145 | Methods of uniformity control for low flow process and chamber to chamber matching | Juan Carlos Rocha-Alvarez, Tom K. Cho, Daemian Raj | 2010-11-09 |
| 7802538 | Method to deposit functionally graded dielectric films via chemical vapor deposition using viscous precursors | Deenesh Padhi, Sohyun Park, Juan Carlos Rocha-Alvarez, Li-Qun Xia, Derek R. Witty +1 more | 2010-09-28 |
| 7699935 | Method and system for supplying a cleaning gas into a process chamber | Ramprakash Sankarakrishnan, Dale R. DuBois, Karthik Janakiraman, Juan Carlos Rocha-Alvarez, Thomas Nowak +2 more | 2010-04-20 |
| 7622005 | Uniformity control for low flow process and chamber to chamber matching | Juan Carlos Rocha-Alvarez, Tom K. Cho, Daemian Raj | 2009-11-24 |
| 7572337 | Blocker plate bypass to distribute gases in a chemical vapor deposition system | Juan Carlos Rocha-Alvarez, Tom K. Cho, Deenesh Padhi, Thomas Nowak, Bok Hoen Kim +2 more | 2009-08-11 |
| 7514125 | Methods to improve the in-film defectivity of PECVD amorphous carbon films | Deenesh Padhi, Chiu Chan, Sudha Rathi, Jianhua Zhou, Karthik Janakiraman +4 more | 2009-04-07 |
| 7273823 | Situ oxide cap layer development | Annamalai Lakshmanan, Daemian Raj, Francimar Schmitt, Bok Hoen Kim | 2007-09-25 |
| 7259111 | Interface engineering to improve adhesion between low k stacks | Deenesh Padhi, Annamalai Lakshmanan, Zhenjiang Cui, Juan Carlos Rocha-Alvarez, Bok Hoen Kim +3 more | 2007-08-21 |
| 7189658 | Strengthening the interface between dielectric layers and barrier layers with an oxide layer of varying composition profile | Annamalai Lakshmanan, Deenesh Padhi, Zhenjiang Cui, Daemian Raj, Juan Carlos Rocha-Alvarez +2 more | 2007-03-13 |
| 7166544 | Method to deposit functionally graded dielectric films via chemical vapor deposition using viscous precursors | Deenesh Padhi, Sohyun Park, Juan Carlos Rocha-Alvarez, Li-Qun Xia, Derek R. Witty +1 more | 2007-01-23 |