Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11367594 | Multizone flow gasbox for processing chamber | Mingle Tong, Li-Qun Xia | 2022-06-21 |
| 10934620 | Integration of dual remote plasmas sources for flowable CVD | Ying Ma, Jay D. Pinson, II, Dongqing Li, Jingmei Liang, Yizhen Zhang | 2021-03-02 |
| 10428426 | Method and apparatus to prevent deposition rate/thickness drift, reduce particle defects and increase remote plasma system lifetime | Ying Ma, Dongqing Li, Jay D. Pinson, II | 2019-10-01 |
| 9506145 | Method and hardware for cleaning UV chambers | Sanjeev Baluja, Alexandros T. Demos, Kelvin Chan, Juan Carlos Rocha-Alvarez, Scott A. Hendrickson +6 more | 2016-11-29 |
| 9364871 | Method and hardware for cleaning UV chambers | Sanjeev Baluja, Alexandros T. Demos, Kelvin Chan, Juan Carlos Rocha-Alvarez, Scott A. Hendrickson +6 more | 2016-06-14 |
| 8349746 | Microelectronic structure including a low k dielectric and a method of controlling carbon distribution in the structure | Bo Xie, Alexandros T. Demos, Sure Ngo, Kang Sub Yim | 2013-01-08 |
| 7829145 | Methods of uniformity control for low flow process and chamber to chamber matching | Ganesh Balasubramanian, Juan Carlos Rocha-Alvarez, Tom K. Cho | 2010-11-09 |
| 7622005 | Uniformity control for low flow process and chamber to chamber matching | Ganesh Balasubramanian, Juan Carlos Rocha-Alvarez, Tom K. Cho | 2009-11-24 |
| 7572337 | Blocker plate bypass to distribute gases in a chemical vapor deposition system | Juan Carlos Rocha-Alvarez, Ganesh Balasubramanian, Tom K. Cho, Deenesh Padhi, Thomas Nowak +2 more | 2009-08-11 |
| 7273823 | Situ oxide cap layer development | Annamalai Lakshmanan, Francimar Schmitt, Bok Hoen Kim, Ganesh Balasubramanian | 2007-09-25 |
| 7189658 | Strengthening the interface between dielectric layers and barrier layers with an oxide layer of varying composition profile | Annamalai Lakshmanan, Deenesh Padhi, Ganesh Balasubramanian, Zhenjiang Cui, Juan Carlos Rocha-Alvarez +2 more | 2007-03-13 |