Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12119223 | Single precursor low-k film deposition and UV cure for advanced technology node | Bo Xie, Ruitong Xiong, Kang Sub Yim, Yijun Liu, Li-Qun Xia | 2024-10-15 |
| 11621162 | Systems and methods for forming UV-cured low-κ dielectric films | Bo Xie, Ruitong Xiong, Kang Sub Yim, Yijun Liu, Li-Qun Xia | 2023-04-04 |
| 11600486 | Systems and methods for depositing low-κdielectric films | Bo Xie, Ruitong Xiong, Kang Sub Yim, Yijun Liu, Li-Qun Xia | 2023-03-07 |
| 11572622 | Systems and methods for cleaning low-k deposition chambers | Bo Xie, Ruitong Xiong, Kang Sub Yim, Yijun Liu, Li-Qun Xia | 2023-02-07 |
| 9391024 | Multi-layer dielectric stack for plasma damage protection | Bo Xie, Kang Sub Yim, Cheng Pan, Taewan Kim, Alexandros T. Demos | 2016-07-12 |
| 9324571 | Post treatment for dielectric constant reduction with pore generation on low K dielectric films | Kang Sub Yim, Pendar Ardalan, Alexandros T. Demos | 2016-04-26 |
| 9165998 | Adhesion layer to minimize dielectric constant increase with good adhesion strength in a PECVD process | Kang Sub Yim, Pendar Ardalan, Alexandros T. Demos | 2015-10-20 |
| 8349746 | Microelectronic structure including a low k dielectric and a method of controlling carbon distribution in the structure | Bo Xie, Alexandros T. Demos, Daemian Raj, Kang Sub Yim | 2013-01-08 |