Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9324571 | Post treatment for dielectric constant reduction with pore generation on low K dielectric films | Kang Sub Yim, Sure Ngo, Alexandros T. Demos | 2016-04-26 |
| 9165998 | Adhesion layer to minimize dielectric constant increase with good adhesion strength in a PECVD process | Kang Sub Yim, Sure Ngo, Alexandros T. Demos | 2015-10-20 |