| 11195730 |
Method and apparatus for processing wafer-shaped articles |
Andreas Gleissner, Thomas Wirnsberger, Franz Kumnig, Alessandro Baldaro, Christian Thomas Fischer +4 more |
2021-12-07 |
| 10490426 |
Method and apparatus for processing wafer-shaped articles |
Andreas Gleissner, Thomas Wirnsberger, Franz Kumnig, Alessandro Baldaro, Christian Thomas Fischer +4 more |
2019-11-26 |
| 10269615 |
Apparatus for treating surfaces of wafer-shaped articles |
Ulrich Tschinderle, Andreas Gleissner, Thomas Wirnsberger |
2019-04-23 |
| 10056287 |
Apparatus for treating surfaces of wafer-shaped articles |
Ulrich Tschinderle, Andreas Gleissner, Thomas Wirnsberger |
2018-08-21 |
| 10043686 |
Apparatus for treating surfaces of wafer-shaped articles |
— |
2018-08-07 |
| 9960057 |
Device for measuring the distribution or impulse of a series of droplets |
Michael Dalmer, Alexander R. Lippert, Philipp Engesser |
2018-05-01 |
| 9653328 |
Method and apparatus for surface treatment using inorganic acid and ozone |
Harald Okorn-Schmidt, Franz Kumning, Thomas Wirnsberger |
2017-05-16 |
| 9633890 |
Device for treating surfaces of wafer-shaped articles and gripping pin for use in the device |
Ulrich Tschinderle, Andreas Gleissner, Thomas Wirnsberger, Franz Kumnig |
2017-04-25 |
| 9597701 |
Apparatus for treating surfaces of wafer-shaped articles |
Andreas Gleissner, Philipp Engesser |
2017-03-21 |
| 8974631 |
Device for fluid treating plate-like articles |
— |
2015-03-10 |
| 8833380 |
Device for treating disc-like articles |
Franz Kumnig, Thomas Wirnsberger |
2014-09-16 |
| 8791614 |
Device for treating disc-like article and method for operating same |
Frank Werfel |
2014-07-29 |
| 8709165 |
Method and apparatus for surface treatment using inorganic acid and ozone |
Harald Okorn-Schmidt, Franz Kumning, Thomas Wirnsberger |
2014-04-29 |
| 8646767 |
Device for holding wafer shaped articles |
Franz Kumnig, Thomas Wirnsberger |
2014-02-11 |
| 8573236 |
Apparatus and method for ultrasonic wet treatment of plate-like articles |
Alexander R. Lippert, Harry Sax |
2013-11-05 |
| 8490634 |
Device for treating disc-like articles |
Franz Kumnig, Thomas Wirnsberger |
2013-07-23 |
| 8485204 |
Closed chamber with fluid separation feature |
Andreas Gleissner |
2013-07-16 |
| 8435356 |
Device and method for wet treating disc-like substrates |
Alexander F. Pfeuffer, Martin Köffler, Alexander R. Lippert |
2013-05-07 |
| 8261757 |
Device and method for wet treating disc-like substrates |
Alexander F. Pfeuffer, Martin Köffler, Alexander R. Lippert |
2012-09-11 |
| 7052577 |
Annular receptacle for a rotating carrier |
— |
2006-05-30 |
