FK

Franz Kumnig

Lam Research: 7 patents #410 of 2,128Top 20%
Overall (All Time): #718,220 of 4,157,543Top 20%
7
Patents All Time

Issued Patents All Time

Showing 1–7 of 7 patents

Patent #TitleCo-InventorsDate
11195730 Method and apparatus for processing wafer-shaped articles Rainer Obweger, Andreas Gleissner, Thomas Wirnsberger, Alessandro Baldaro, Christian Thomas Fischer +4 more 2021-12-07
10490426 Method and apparatus for processing wafer-shaped articles Rainer Obweger, Andreas Gleissner, Thomas Wirnsberger, Alessandro Baldaro, Christian Thomas Fischer +4 more 2019-11-26
9633890 Device for treating surfaces of wafer-shaped articles and gripping pin for use in the device Ulrich Tschinderle, Andreas Gleissner, Thomas Wirnsberger, Rainer Obweger 2017-04-25
8833380 Device for treating disc-like articles Rainer Obweger, Thomas Wirnsberger 2014-09-16
8668777 Process for treating a semiconductor wafer Harald Okorn-Schmidt, Dieter Frank 2014-03-11
8646767 Device for holding wafer shaped articles Thomas Wirnsberger, Rainer Obweger 2014-02-11
8490634 Device for treating disc-like articles Rainer Obweger, Thomas Wirnsberger 2013-07-23