Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11195730 | Method and apparatus for processing wafer-shaped articles | Rainer Obweger, Andreas Gleissner, Thomas Wirnsberger, Alessandro Baldaro, Christian Thomas Fischer +4 more | 2021-12-07 |
| 10490426 | Method and apparatus for processing wafer-shaped articles | Rainer Obweger, Andreas Gleissner, Thomas Wirnsberger, Alessandro Baldaro, Christian Thomas Fischer +4 more | 2019-11-26 |
| 9633890 | Device for treating surfaces of wafer-shaped articles and gripping pin for use in the device | Ulrich Tschinderle, Andreas Gleissner, Thomas Wirnsberger, Rainer Obweger | 2017-04-25 |
| 8833380 | Device for treating disc-like articles | Rainer Obweger, Thomas Wirnsberger | 2014-09-16 |
| 8668777 | Process for treating a semiconductor wafer | Harald Okorn-Schmidt, Dieter Frank | 2014-03-11 |
| 8646767 | Device for holding wafer shaped articles | Thomas Wirnsberger, Rainer Obweger | 2014-02-11 |
| 8490634 | Device for treating disc-like articles | Rainer Obweger, Thomas Wirnsberger | 2013-07-23 |