Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11195730 | Method and apparatus for processing wafer-shaped articles | Rainer Obweger, Andreas Gleissner, Thomas Wirnsberger, Franz Kumnig, Christian Thomas Fischer +4 more | 2021-12-07 |
| 10490426 | Method and apparatus for processing wafer-shaped articles | Rainer Obweger, Andreas Gleissner, Thomas Wirnsberger, Franz Kumnig, Christian Thomas Fischer +4 more | 2019-11-26 |
| 8461055 | Process for preparing cleaned surfaces of strained silicon | Khalid Radouane | 2013-06-11 |