Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9968970 | Spin chuck with in situ cleaning capability | Andreas Gleissner | 2018-05-15 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9968970 | Spin chuck with in situ cleaning capability | Andreas Gleissner | 2018-05-15 |