Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11810796 | Wafer cleaning method and apparatus therefore | Ulrich Tschinderle, Reinhard Sellmer, Walter Esterl | 2023-11-07 |
| 10410888 | Device and method for removing liquid from a surface of a disc-like article | Dietmar Hammer | 2019-09-10 |
| 9316443 | Method and apparatus for liquid treatment of wafer shaped articles | Karl-Heinz Hohenwarter, Vijay Kumar Badam | 2016-04-19 |