Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11810796 | Wafer cleaning method and apparatus therefore | Christoph SEMMELROCK, Ulrich Tschinderle, Walter Esterl | 2023-11-07 |
| 8932408 | Method for cleaning a surface | — | 2015-01-13 |
| 7179753 | Process for planarizing substrates of semiconductor technology | Hans-Jurgen Kruwinus | 2007-02-20 |
| 6494221 | Device for wet etching an edge of a semiconductor disk | Robert KUMNIG | 2002-12-17 |