Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7179753 | Process for planarizing substrates of semiconductor technology | Reinhard Sellmer | 2007-02-20 |
| 6627548 | Process for treating semiconductor substrates | Geert De Nijs | 2003-09-30 |
| 6385863 | Process and device for drying disk-like objects | — | 2002-05-14 |
| 6169038 | Method for rough-etching a semiconductor surface | FREDERIC KOVACS | 2001-01-02 |
| 6016612 | Process and device for drying of substrates | — | 2000-01-25 |