Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10410888 | Device and method for removing liquid from a surface of a disc-like article | Christoph SEMMELROCK | 2019-09-10 |
| 9972514 | Apparatus for liquid treatment of wafer shaped articles | Reinhold SCHWARZENBACHER, Milan Pliska, Bridget Hill, Michael Brugger | 2018-05-15 |
| 8608146 | Reinforced pin for being used in a pin chuck, and a pin chuck using such reinforced pin | Michael Brugger, Otto Lach | 2013-12-17 |