Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10658204 | Spin chuck with concentrated center and radial heating | Bridget Hill, Gerhard Mueller, Henry Roger Osner, Karl-Heinz Hohenwarter, Ulrich Tschinderle +1 more | 2020-05-19 |
| 9130002 | Device for holding wafer shaped articles | Dieter Frank, Roman Fuchs, Otto Lach | 2015-09-08 |
| 8997764 | Method and apparatus for liquid treatment of wafer shaped articles | — | 2015-04-07 |
| 8945341 | Method and device for wet treatment of plate-like articles | Masaichiro Ken Matsushita | 2015-02-03 |
| 8821681 | Apparatus and method for wet treatment of disc-like articles | Alexander Schwartzfurtner, Dieter Frank | 2014-09-02 |
| 8596623 | Device and process for liquid treatment of a wafer shaped article | Dieter Frank | 2013-12-03 |